Overview:Lithography: Principles, Processes & Materials - Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nonfabrication technologies and manufacturing of integrated circuits (IC). Optical lithography was the first and the earliest microfabrication technology used in semiconductor IC manufacturing. It is still the main tool of lithography in today's very large scale integrated circuits and MEMS. This book presents topical research from across the globe in the study of lithography; its principles, processes and materials. Topics discussed herein include nanofabrication in electron beam lithography; submicron gratings prepared by laser interference lithography; thermal electric field imprinting lithography; local anodic oxidation and other alternative lithography techniques; as well as nanosphere lithography to enable plasmonic applications.

This book is on page /88f0ff300130a9332bf7ee8997e69000/book/1603729682-9781617618376. It was written by the following authors: Theodore C Hennessy. Book Lithography: Principles, Processes & Materials, which can be read online, published by the company: Nova Science Publishers Inc. Other books on similar topics can be found in sections: Science, Medicine, Technology. The book was published on 2011-06-08 00:00:00. It has 284 pages and is published in Hardback format and weight 760 g. File for download Lithography: Principles, Processes & Materials has PDF format and is called lithography-principles-processes-materials.pdf. Other books you can download below. Our nottedeiricercatoriaq.it site is not responsible for the content of PDF files.

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